PURPOSE: To reduce the fluctuation of characteristic of the vibrator after its completion by providing a gap not only at a vibrating part but at both end parts of a short side respectively and reducing the stress that is produced toward the polarizing axis by the sheathing resin.
CONSTITUTION: The terminals 22 are connected to the electrodes 18 by soldering at both end parts of a short side of a vibrator main body 16. The wax is applied to the entire part of the main body 16 and partly to the terminals 22 as shown by a dotted line 24, and the sheathing resin 26 like the epoxy resin, etc., is applied for a baking treatment. Thus the wax is impregnated with the resin 26 and a gap 28 is formed in a part enclosed by the line 24. Thus an energy shut-up type thickness shear vibrator 10 is obtained. In such a constitution of the vibrator 10, the gaps 28 are formed also at both ends parts of the main body 16. Therefore the stress of the main body 16 produced in the polarizing axis direction can be reduced. Then the fluctuation of characteristic is reduced for the vibrator 10.
JP2006073977 | METHOD FOR MANUFACTURING WAFER LEVEL PACKAGE USING LASER IRRADIATION |
JP4206904 | MEMS resonator |
JPS61218213A | 1986-09-27 | |||
JPS61151427U | 1986-09-19 | |||
JPS61199921U | 1986-12-15 | |||
JPS6214510A | 1987-01-23 |