Title:
EQUIPMENT FOR INTEGRATING INTERFEROGRAM
Document Type and Number:
Japanese Patent JP3497927
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To reduce sharply a burden on arithmetic processing by executing integration processing of unit interferograms shaped by a cutting means.
SOLUTION: Equipment for integrating interferogram which integrates a plurality of unit interferograms each obtained by casting an interference light of one scan on an object of measurement. It has a maximum position detecting means 16 which detects a center burst position from interferogram data stored in a unit interferogram storage means 14, a cutting means 18 which cuts the unit interferogram by a predetermined amount on the opposite sides on the positional axis thereof, using the center burst position of the unit interferogram detected by the maximum position detecting means 16 as reference, and collects the cut interferograms and an integrating means 20 which integrates a plurality of the cut interferograms 'it obtained sequentially in correspondence to a plurality of the unit interferograms.
Inventors:
Norio Wakimoto
Shinichiro Watanabe
Toshiyuki Nagoshi
Shinichiro Watanabe
Toshiyuki Nagoshi
Application Number:
JP20054495A
Publication Date:
February 16, 2004
Filing Date:
July 13, 1995
Export Citation:
Assignee:
JASCO Corporation
International Classes:
G01J3/45; (IPC1-7): G01J3/45
Domestic Patent References:
| JP6238324A | ||||
| JP727612A | ||||
| JP346523A |
Attorney, Agent or Firm:
Yuji Iwahashi
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