Title:
熱処理システムを抵抗により加熱する装置および方法
Document Type and Number:
Japanese Patent JP2004514287
Kind Code:
A
Abstract:
A resistive heater having a doped ceramic heating element embedded either partially or completely within a matrix of undoped ceramic material. The ceramic may be silicon carbide, and the dopant may be nitrogen. Many of the advantages of the present heater stern from the fact that the materials used for the heating elements and the matrix material surrounding those elements have substantially the same coefficient of thermal expansion. In one embodiment, the heater is a monolithic plate that is compact, strong, robust, and low in thermal mass, allowing it to respond quickly to power input variations. The resistive heater may be used in many of the reactors and processing chambers used to fabricate integrated circuits, such as those that deposit epitaxial films, and carry out rapid thermal processing.
Inventors:
John's Guard Christian Yi
Mesineo Daniel El
Thallows David E
Mesineo Daniel El
Thallows David E
Application Number:
JP2002543680A
Publication Date:
May 13, 2004
Filing Date:
November 07, 2001
Export Citation:
Assignee:
Mattson Technology Incorporated
International Classes:
F27B9/06; F27B9/36; F27D7/06; F27D11/02; H01L21/00; H01L21/02; H01L21/324; (IPC1-7): H01L21/02; F27B9/06; F27B9/36; F27D7/06; F27D11/02; H01L21/324
Attorney, Agent or Firm:
Minoru Nakamura
Fumiaki Otsuka
Sadao Kumakura
Shishido Kaichi
Toshio Imajo
Nobuo Ogawa
Village shrine Atsuo
Takaki Nishijima
Atsushi Hakoda
Fumiaki Otsuka
Sadao Kumakura
Shishido Kaichi
Toshio Imajo
Nobuo Ogawa
Village shrine Atsuo
Takaki Nishijima
Atsushi Hakoda