Title:
湿気フィルタを有する装置
Document Type and Number:
Japanese Patent JP2004526163
Kind Code:
A
Abstract:
A chamber inside a housing communicates with the surrounding area of the housing via a gas exchange path, whereby a filter element comprising a nanoporous, hydrophobic or hydrophobicized material is located in the gas exchange path. The chamber serves, for example, to accommodate electronic circuits or it is designed as a reference pressure chamber of a relative pressure sensor. The inventive relative pressure sensor for recording a measured pressure with regard to a reference pressure comprises a reference pressure path (23) that extends between a surface, which can be subjected to the action of the reference pressure, and an opening inside a reference pressure chamber (22), whereby a filter element (30), which is located inside the reference pressure path, comprises a hydrophobic or hydrophobicized nanoporous material. The filter element makes a pressure compensation possible due to its permeability to N2 and O2 whereas water molecules are selectively retained. The nanoporous material preferably comprises an inorganic material, particularly Al2O3, TiO2 or SiO2. The nanoporous material is preferably hydrophobic and/or can be impregnated with a hydrophobic layer, preferably with a silane, in order to optimize the hydrophobic properties.
Inventors:
Frank Hegner
Rossburg, Andreas
Schmidt, Elke
Dreves, Wolfeld
Bernhard, Walter
Kirst, michael
Rossburg, Andreas
Schmidt, Elke
Dreves, Wolfeld
Bernhard, Walter
Kirst, michael
Application Number:
JP2002588128A
Publication Date:
August 26, 2004
Filing Date:
October 27, 2001
Export Citation:
Assignee:
ENDRESS + HAUSER GMBH + CO.KG
International Classes:
B01D39/00; G01L13/02; B01D39/20; G01L9/00; G01L19/06; H05H5/02; (IPC1-7): G01L13/02
Attorney, Agent or Firm:
Yoshiyuki Osuga