Title:
EVACUATION DEVICE
Document Type and Number:
Japanese Patent JP2001207984
Kind Code:
A
Abstract:
To provide an evacuation device having high energy efficiency when pressure on an intake side is in ultimate pressure or in a vacuum state in a certain extent, by reducing power by differential pressure.
The evacuation device 100 comprises of a roughing vacuum pump B and a booster pump A. Both the roughing vacuum pump B and the booster pump A are constituted of a screw vacuum pump and the design pumping speed of the roughing vacuum pump B is sufficiently smaller than that of the booster pump A, but in a degree that the roughing vacuum pump B can function as a roughing vacuum pump. The number of turns in a screw of the booster pump A is set smaller than that of the roughing vacuum pump B.
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Inventors:
ANDO KIYOSHI
Application Number:
JP2000213110A
Publication Date:
August 03, 2001
Filing Date:
July 13, 2000
Export Citation:
Assignee:
TEIJIN SEIKI CO LTD
International Classes:
F04C18/16; F04B49/06; F04C23/00; F04C25/02; F04C28/02; F04C28/08; F04C29/00; (IPC1-7): F04C25/02; F04B49/06; F04C18/16; F04C23/00; F04C29/10
Attorney, Agent or Firm:
Ariga Gunichiro