Title:
EVACUATION SYSTEM AND ITS OPERATION METHOD
Document Type and Number:
Japanese Patent JP2003269354
Kind Code:
A
Abstract:
To provide an evacuation system and its operation method wherein an operation cost is reduced by restraining consumption of energy.
In this evacuation system, when replacing a work by opening a door of a chamber 1, a fore line valve 7 is opened, and a mechanical booster pump 8 is stopper with an oil diffusing pump 6 and a rotary pump 9 held operated. At this time, back pressure of the oil diffusing pump 6 is detected by an exhaust pipe inside vacuum gauge 10. When the back pressure is deviated from a proper range, a control device 20 controls the back pressure by starting the mechanical booster pump 8.
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Inventors:
YAMAKAWA KENJI
Application Number:
JP2002069725A
Publication Date:
September 25, 2003
Filing Date:
March 14, 2002
Export Citation:
Assignee:
SHIN MEIWA IND CO LTD
International Classes:
F04C25/02; B01J3/00; B01J3/02; F04B37/16; F04C23/00; F04C28/02; F04C28/06; F04C28/26; F04C28/28; (IPC1-7): F04C25/02; B01J3/00; B01J3/02; F04B37/16; F04C23/00; F04C29/10
Attorney, Agent or Firm:
Yoshihiro Tsunoda (2 outside)