Title:
評価方法および荷電粒子ビーム装置
Document Type and Number:
Japanese Patent JP7357741
Kind Code:
B2
Abstract:
To provide an evaluation method capable of accurately evaluating a control operation.SOLUTION: An evaluation method of a control operation of a deflector control device in a charged particle beam system that including a charged particle source, a deflector for deflecting a charged particle beam emitted from the charged particle source, a detector for detecting a signal generated by irradiating an object to be measured with a charged particle beam, and a deflector control device for controlling the deflector includes a step of detecting a signal by the detector and observing a detection signal when the deflector control device performs a control operation to control the deflector such that the charged particle beam moves and becomes stationary, and a step of evaluating the control operation on the basis of the detection signal.SELECTED DRAWING: Figure 5
Inventors:
Toshiyuki Morimura
Genta Kaneda
Yasuhiro Kumano
Yojiro Nakamura
Takashi Kawashima
Yukinobu Wakasugi
Genta Kaneda
Yasuhiro Kumano
Yojiro Nakamura
Takashi Kawashima
Yukinobu Wakasugi
Application Number:
JP2022152266A
Publication Date:
October 06, 2023
Filing Date:
September 26, 2022
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
H01L21/027; G03F7/20; H01J37/147; H01J37/153; H01J37/22; H01J37/305
Domestic Patent References:
| JP11274032A | ||||
| JP9293473A | ||||
| JP9246146A | ||||
| JP1105534A | ||||
| JP2014194982A |
Attorney, Agent or Firm:
Yukio Fuse
Michie Obuchi
Yoshinobu Yoshida
Michie Obuchi
Yoshinobu Yoshida