Title:
エキシマランプ装置
Document Type and Number:
Japanese Patent JP5169914
Kind Code:
B2
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Inventors:
Fumihiko Oda
Application Number:
JP2009051683A
Publication Date:
March 27, 2013
Filing Date:
March 05, 2009
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
H01J65/00; H01J61/52; H01L21/304
Domestic Patent References:
| JP2007073494A | ||||
| JP2006012481A | ||||
| JP2008311172A | ||||
| JP7111146A | ||||
| JP2001076682A | ||||
| JP2006324251A |
Attorney, Agent or Firm:
Masahiko Oi