To provide an exhaust dust collector of a single crystal boosting apparatus, which is installed in an exhaust system of the single crystal boosting apparatus, and can provide a sufficient dust removing effect.
A plurality of straightening fixed vanes 28a-28d which swirl and guide dust-containing gas introduced from an introduction pipe 22 to the lower part of a cyclone body 21 in a swirling direction nearly coinciding with the swirling direction of the gas are provided in the cyclone body 21. The straightening fixed vanes are provided with a plurality of fins which are along predetermined planes orthogonal to the central axis of a cylinder part 24, and radially fixed and arranged between the outer periphery of an outflow pipe 23 inside the cyclone body 21 and the inner periphery of the cylinder part 24 or a frustoconical part 25. The plurality of fins have an inclination angle of 30-50° against a first plane orthogonal to the central axis of the cylinder part.
URAKOSHI MASAHIKO
Kiyoshi Kuruma
Groundwork Kenichi