Title:
EXHAUSTER
Document Type and Number:
Japanese Patent JP3483591
Kind Code:
B2
Abstract:
PURPOSE: To open a relief valve positively to discharge gas even with the lead-in of a large quantity of diluent gas in the case of leading in diluent gas and exhausting it after dilution at the time of exhausting gas in a specific space through the relief valve.
CONSTITUTION: One end part of a housing 24 is connected to the exhaust port 23 of a cryopump 13 stored with gas to be discharged, and the other end part of the housing 24 is provided with an exhaust port 25. A relief valve 27 is provided in the housing 24, and the discharge port 41 of a lead-in pipe 40 for leading diluent gas into the housing 24 is turned to face the exhaust port 25. Accordingly, even in the case of leading in a large quantity of diluent gas, pressure rise in the housing 24 is prevented, so that there is no influence on the function of the relief valve 27.
Inventors:
Manabu Amikura
Application Number:
JP15144193A
Publication Date:
January 06, 2004
Filing Date:
May 28, 1993
Export Citation:
Assignee:
東京エレクトロン株式会社
バリアンセミコンダクターイクイップメント株式会社
バリアンセミコンダクターイクイップメント株式会社
International Classes:
F04B37/08; H01J37/18; H01J37/317; H01L21/265; H01L21/302; H01L21/3065; (IPC1-7): F04B37/08; H01J37/18; H01J37/317; H01L21/3065
Domestic Patent References:
| JP4128575A | ||||
| JP533766A | ||||
| JP61294176A | ||||
| JP6129352A | ||||
| JP599139A | ||||
| JP4353273A |
Attorney, Agent or Firm:
Tetsuo Kanemoto (1 person outside)