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Patent Searching and Data


Title:
EXPOSURE DEVICE AND EXPOSURE METHOD
Document Type and Number:
Japanese Patent JP2003050467
Kind Code:
A
Abstract:

To shorten the time required for exposure of a hologram plate.

The exposure device 1 which exposes a hologram plate 9 held at a holder 10 by introducing the object light from an optical unit 241 and the reference light from an optical unit 242 to the hologram plate 9 is provided with mirrors 221 and 222 for scanning the hologram plate with the object light and the reference light. The hologram plate 9 is continuously moved in an X direction by the holder 10 and the irradiation region of the object light and the reference light is scanned together with the movement of the hologram plate 9. As a result, the exposure of one element hologram can be performed while the hologram plate 9 is moved and as a result thereof, the need for starting the exposure after the attenuation of the vibration of the hologram plate 9 is waited by stopping the movement of the hologram plate 9 like heretofore is eliminated and the time requiring for the exposure of the hologram plate 9 can be shortened.


Inventors:
YAMADA MITSUHIKO
Application Number:
JP2001238551A
Publication Date:
February 21, 2003
Filing Date:
August 07, 2001
Export Citation:
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Assignee:
DAINIPPON SCREEN MFG
International Classes:
G03F7/20; G03H1/26; (IPC1-7): G03F7/20; G03H1/26
Attorney, Agent or Firm:
Masahiro Matsuzaka