Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
EXPOSURE PROCESSOR
Document Type and Number:
Japanese Patent JP2003050470
Kind Code:
A
Abstract:

To provide an exposure processor which can increase the positioning precision of a stage for exposed object setting by preventing the stage from being influenced largely by the expanding/contracting force of bellows.

This processor is equipped with a processing tank 2, a stage 3 for exposure object setting which is arranged in the processing tank 2, a stage moving means M2 which moves the stage 3 in a fixed direction, a drawing-in opening 21 for drawing a connection member 70 connected to the stage 3 into the processing tank 2 from outside, and a 1st expansible/shrinkable bellows which seals the drawing-in opening 21. Further, the processor is equipped with a moving body 4 for assistance which can be freely moved in the fixed direction in the processing tank 2 by a moving means other than the stage moving means M2 and bears force produced as the 1st bellows extends and shrinks.


Inventors:
SATO TADASHI
OZAWA YASUYUKI
Application Number:
JP2001237049A
Publication Date:
February 21, 2003
Filing Date:
August 03, 2001
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
FUJITSU LTD
International Classes:
G03F7/20; G11B7/26; H01L21/027; H01L21/68; (IPC1-7): G03F7/20; G11B7/26; H01L21/027; H01L21/68
Attorney, Agent or Firm:
Minoru Yoshida (2 outside)