Exposure device

Japanese Patent JP6119035

B2

Provided is an exposure apparatus, which uses a plurality of short-length lamps as light sources, and which can perform exposure with less illuminance unevenness by means of a simple structure, said exposure apparatus having the lamps easily replaced. An exposure apparatus (100) has: a transfer unit (2), which transfers a subject to be exposed (11) in the transfer direction; and a light irradiation unit (3) having a plurality of light irradiation units (31) disposed at predetermined intervals within a horizontal plane, each of said light irradiation units being provided with bar-like light sources (32) having the longitudinal direction length thereof shorter than that of the subject to be exposed (11), and polarizers (34) disposed between the light sources (32) and the subject to be exposed (11). Each of the light irradiation units (31) has the light sources (32) and the polarizers (34) disposed parallel to the subject to be exposed (11), the direction of the polarization axis of each of the polarizers (34) is set to the predetermined direction with respect to the transfer direction, and the light sources (32) are respectively disposed such that the longitudinal direction of the light sources (32) is parallel or diagonal to the transfer direction. The exposure apparatus (100) has a swinging means (56b) that swings the subject to be exposed (11) or the light irradiation unit (3) in the direction intersecting the transfer direction.

Kazushige Hashimoto
Arai Toshinari
Yoshihiro Tomizuka

JP2012149960A

April 26, 2017

July 03, 2012

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Buoy Technology Co., Ltd.

G03F7/20; F21S2/00; F21V19/00

JP2006323060A
JP4182128A
JP10288842A
JP2005049461A
JP2007503612A
JP6005496A
JP2011134491A
JP2012130831A
JP201394737A

Eichi International Patent Office

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