Title:
EXTREMELY SMALL OPTICAL WAVEGUIDE AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP3876303
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a device which propagates light to an optical waveguide of microsize exceeding the diffraction limit of light and a method of manufacturing an optical waveguide of microsize smaller than the wavelength of light.
SOLUTION: The extremely small optical waveguide is formed of an oxide film which is partially buried in a metallic substrate and has a width and a height equal to or less than the wavelength of light and is characterized by that the metallic substrate is formed of a composite laminated film of different kinds of metals such as titanium, aluminum, and silver. The manufacturing method for the extremely small optical waveguide is characterized by that the oxide film is formed by anodizing the surface of the metallic substrate by using a probe tip of an atomic force microscope, etc.
Inventors:
Takashi Tokizaki
Takashi Shimizu
Takashi Shimizu
Application Number:
JP2002008580A
Publication Date:
January 31, 2007
Filing Date:
January 17, 2002
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
International Classes:
G02B6/122; G02B6/13; (IPC1-7): G02B6/122; G02B6/13
Domestic Patent References:
| JP6077578A | ||||
| JP2001009800A | ||||
| JP2001272566A | ||||
| JP2003057461A | ||||
| JP2002333538A |
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