Title:
FEEDFORWARD CONTROL METHOD FOR VIBRATION ISOLATION TABLE
Document Type and Number:
Japanese Patent JP2700728
Kind Code:
B2
Abstract:
PURPOSE: To provide feedforward control which is effective to directacting disturbance which can not be coped with by feedback control.
CONSTITUTION: This feedforward control method consists of a vibration isolation table main body 2 where equipment K is mounted, active actuators A-D for supporting the vibration isolation table main body 2, and a sensor for detecting the vibration of the vibration isolation table main body 2; and a known signal is supplied to the active actuators A-D, and the response of the vibration isolation table at this time is detected by the sensor, whose output data Y is inputted to an arithmetic unit cont to calculate a system which gives the reverse input/ output relation. Then this reverse system is multiplied by output data Y found while the equipment K mounted on the vibration isolation table main body 2 is put in operation to generate the further inverted feedforward control signal, which is stored; and the feedforward control signal based upon the reverse system is inputted to the active actuators A-D synchronously when the equipment K is operated next time to cancel vibration due to the operation of the equipment K.
Inventors:
Takahide Osaka
Masashi Yasuda
Masao Ikeda
Masashi Yasuda
Masao Ikeda
Application Number:
JP19250691A
Publication Date:
January 21, 1998
Filing Date:
July 05, 1991
Export Citation:
Assignee:
TOKKYOKIKI CORPORATION
Masao Ikeda
Masao Ikeda
International Classes:
F16F15/02; G05D3/12; G05D19/02; (IPC1-7): G05D19/02
Domestic Patent References:
| JP221044A | ||||
| JP5727483B2 |
Attorney, Agent or Firm:
Yoshiaki Mori