Title:
フェライト薄膜及びその製造方法
Document Type and Number:
Japanese Patent JP4563056
Kind Code:
B2
Inventors:
Koichi Kondo
Takakuni
Tatsuya Chiba
Kichi Sakae Kichi
Masanori Abe
Takakuni
Tatsuya Chiba
Kichi Sakae Kichi
Masanori Abe
Application Number:
JP2004075705A
Publication Date:
October 13, 2010
Filing Date:
March 17, 2004
Export Citation:
Assignee:
NEC TOKIN CORPORATION
National University Corporation Tokyo Institute of Technology
National University Corporation Tokyo Institute of Technology
International Classes:
C23C18/00; C23C20/00; H01F10/20
Domestic Patent References:
JP2004039672A | ||||
JP2004014614A | ||||
JP2003243216A | ||||
JP63042378A | ||||
JP6100318A |
Attorney, Agent or Firm:
Kenho Ikeda
Shuichi Fukuda
Shuichi Fukuda