FERROELECTRIC MATERIAL ELEMENT AND MANUFACTURE THEREOF

Japanese Patent JP3409944

B2

PURPOSE: To provide a high-sensitivity and low-cost ferroelectric material element.
CONSTITUTION: An MgO thin film 102, of which crystal is preferentially orientated and which consists of an NaCl crystal structure, is arranged on the surface of a stainless metal substrate 101, a lower electrode 103 consisting of a Pt thin film is arranged on the surface of the thin film 102, a specified part of the electrode 103 is covered with a ferroelectric material film 104 consisting of a Pb0.9La0.1Ti0.975O3 film and an upper electrode 108 consisting of an Ni-Cr thin film is arranged on the surface of the film 104. Etching holes 105 are formed in such a way that they are penetrated the thin film 102, the electrode 103, the film 104 and the electrode 108 and reach the surface of the substrate 101 and air gap layers 110 formed by etching away parts of the substrate 101 through the holes 105 are provided in the upper layer part of the substrate 101.

WO/2013/061356	SLIP SENSOR
JP2732128	INDUSTRIAL APPLICABILITY: Coaxial cable-shaped piezoelectric converter and its manufacturing method.
JP6384575	Sensor devices, force detectors, and robots

Satoru Fujii
Ryoichi Takayama
Ken Kamada
Jun Tomozawa

JP12695895A

May 26, 2003

May 26, 1995

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Matsushita Electric Industrial Co., Ltd

G01L1/16; C04B35/46; C04B35/472; C04B35/49; C23C16/40; C23C16/50; C23F1/00; C23F4/00; G01J1/02; H01L21/302; H01L21/3065; H01L29/84; H01L37/02; H01L41/08; H01L41/09; H01L41/187; H01L41/22; H01L41/39; (IPC1-7): H01L41/09; C04B35/46; C04B35/49; C23C16/40; C23C16/50; C23F1/00; C23F4/00; G01J1/02; G01L1/16; H01L21/3065; H01L29/84; H01L37/02; H01L41/08; H01L41/187; H01L41/22; H01L41/24

JP6230695A
JP6215975A
JP4368186A
JP5145123A
JP8162686A

Hiroyuki Ikeuchi (1 person outside)

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