To provide a filed emission display element and its manufacturing method which is made so as to enhance the field emission efficiency by optimizing the conditions at each processing step, through structuring of a thin-film cathode type element, using a diamond-like-carbon film, and which is not conical cathode types which use Mo or Si used currently.
The element includes a DLC thin film formed on a glass substrate; a lower electrode formed on the DLC thin film, having a first region on which a first hole is formed, a second region which continues from the first region as a center with a slope becoming thicker, the farther it is outside, and a third region made in a uniform thickness outside of the second region; an insulating layer formed in a shape rounded with a given thickness at the outside and out of contact with, and separated by a certain distance from the second region of the lower electrode; an upper electrode formed on the insulation layer with a second hole being smaller than the first at a place, corresponding to the first hole of the lower electrode; are included in the structure.
YEOM GEUN YONG
LEE DO HAING
