Title:
FILM CONVEYING AND FORMING APPARATUS
Document Type and Number:
Japanese Patent JP2014125308
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a film conveying and forming apparatus capable of handling and conveying a base material without being in contact with a thin film formed while performing film forming processing on a front surface of the base material by a roll-to-roll method.SOLUTION: A film conveying and forming apparatus continuously conveys a thin plate long body of a base material from a feeding reel section to a take-up reel section and performs a predetermined processing on the base material being conveyed to form a thin film on a front surface of the base material. The film conveying and forming apparatus includes a base material handling section for adjusting a travel state of the base material on a conveying path of the base material. In the base material handling section, a Nelson roller is used. The base material is hung on the Nelson roller so that a rear surface of the base material is in contact with the Nelson roller. Thus, the front surface of the base material is conveyed in a non-contact state from the feeding reel section to the take-up reel section, and processing is performed while the base material is conveyed.
Inventors:
ATSUTA NAOYUKI
ONCHI TAKUYA
TERADA TOYOJI
ONCHI TAKUYA
TERADA TOYOJI
Application Number:
JP2012283019A
Publication Date:
July 07, 2014
Filing Date:
December 26, 2012
Export Citation:
Assignee:
TORAY ENG CO LTD
International Classes:
B65H20/02; B65H23/16; H01L31/06
Domestic Patent References:
| JP2005113165A | 2005-04-28 | |||
| JPH07124643A | 1995-05-16 |
Foreign References:
| US3695534A | 1972-10-03 |