PURPOSE: To provide the method capable of easily and stably forming the multilayered artificial lattice films of transition metals/noble metals for the recording medium having a high coercive force without deteriorating the corrosion resistance and film structure.
CONSTITUTION: The multilayered artificial lattice films of the transition metals/noble metals having the high coercive force are formed by setting 'the sputtering gaseous pressure at the time of forming the film of the noble metal layers' higher than 'the sputtering gaseous pressure at the time of forming the films of the transition metal layers', as shown in Fig., at the time of forming the multilayered artificial lattice films of the transition metals (Co, Fe, Ni, etc.)/noble metals (Pt, Pd, etc.) for the magneto-optical or perpendicular magnetic recording medium by sputtering. More preferably, the sputtering gaseous pressure at the time of forming the films of the noble metal layers set is at 0.5 to 5.0Pa and the sputtering gaseous pressure at the time of forming the films of the transition metal layers at 0.01 to 1.0Pa and the ratio of 'the sputtering gaseous pressure at the time of forming the film of the noble metal layers' to 'the the sputtering gaseous pressure at the time of forming the film of the transition metal layers' is set at 1.2 to 100, by which the film characteristics of the multilayered films and the stability of the film formation are additionally improved.
KUNO AKIRA
NAKAMURA YUICHIRO
OHASHI TAKEO
