PURPOSE: To provide the method capable of easily and stably forming the multilayered artificial lattice films of transition metals/noble metals for the recording medium having a high coercive force (Hc) without particularly deteriorating the corrosion resistance and film structure.
CONSTITUTION: The multilayered artificial lattice films of the transition metals/noble metals having the high coercive force are formed by setting 'the sputtering gaseous pressure at the time of forming the plural layers of one part inclusive of at least the noble metal layers' higher than 'the sputtering gaseous pressure at the time of forming the plural layers of the other part', as shown in Fig., at the time of forming the multilayered artificial lattice films of the transition metals (Co, Fe, Ni, etc.)/noble metals (Pt, Pd, etc.) for the magneto- optical or perpendicular magnetic recording medium by sputtering. More preferably, the sputtering gaseous pressure at the time of forming the films under the above-mentioned high gaseous pressure is set at 0.5 to 5.0Pa and the sputtering gaseous pressure at the time of forming the films under the above-mentioned low gaseous pressure at 0.01 to 1.0Pa and the ratio of 'the sputtering gaseous pressure at the time of forming the films under the high gaseous pressure' to the 'sputtering gaseous pressure at the time of forming the low gaseous pressure' is set at 1.2 to 100, by which the film characteristics and the stability of the film formation are additionally improved.
TAKAHASHI KAZUNARI
NAKAMURA YUICHIRO
OHASHI TAKEO
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