PURPOSE: To prevent sticking of a film to a light transmission window by dividing a reaction vessel to a protective chamber and reaction chamber, communicating both chambers with a reducing and expanding nozzle provided along an optical path and introducing a non-film forming gas into the protective chamber.
CONSTITUTION: The inside of the reactor 1 is divided to the protective chamber 3 on the light transmission window 2 side and the reaction chamber 5 on a substrate 4 side. Both chambers 3, 5 are communicated by the reducing and expanding nozzle 7 provided along the optical path. While the inside of the reaction chamber 5 is evacuated, the non-film forming gas is supplied from a gas source 8 into the protective chamber 3 and a film forming gas is supplied from a gas source 9 into the reaction chamber 5. The non-film forming gas flows through the nozzle 7 into the film forming chamber 5 when the pressure in the protective chamber 3 is maintained larger than the pressure in the film forming chamber 5. The back flow of the film forming gas supplied into the reaction chamber 5 is thereby prevented and the contact thereof with the light transmission window 2 is prohibited. The film forming gas is blown by the flow of the non-film forming gas to the substrate 4, by which the film formation is executed.
KAMIYA OSAMU
SUGATA MASAO
KURIHARA NORIKO
SUGATA HIROYUKI
DEN TORU
| JPS60190566A | 1985-09-28 |