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Title:
FILM FORMING METHOD AND FILM FORMING DEVICE UNDER PLASMA ATMOSPHERE
Document Type and Number:
Japanese Patent JP2011246777
Kind Code:
A
Abstract:

To provide a film forming method and film forming device which can efficiently form a film of film forming raw material on a material to be treated under a plasma atmosphere for reducing plasma damage on the material to be treated, and to especially provide a film forming method and film forming device of a gas barrier film.

In the film forming method, ionized film forming raw material is deposited on the material to be treated 1 under the plasma atmosphere. A magnetic field environment, in which a magnetic field line 2 faces a direction 9 separating from a film forming surface 3 of the material to be treated 1, is formed, and the film forming raw material is deposited on the film forming surface 3 of the material to be treated 1 in the magnetic field environment. A direction of the magnetic field line 2 is a direction of a magnetic field line directing from an N pole to an S pole of a magnet, and a direction of bouncing a charged particle 4 for forming plasma in the direction 9 separating from the film forming surface 3. Such the magnetic field line 2 can be achieved by arranging the N pole of a permanent magnet or electromagnet on a side closer to the side of supplying the film forming raw material, and arranging the S pole to a side apart from there or the like.


Inventors:
KISHIMOTO YOSHIHIRO
Application Number:
JP2010122338A
Publication Date:
December 08, 2011
Filing Date:
May 28, 2010
Export Citation:
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Assignee:
DAINIPPON PRINTING CO LTD
International Classes:
C23C14/54; C23C14/24; C23C16/52
Domestic Patent References:
JP2002097569A2002-04-02
JP2009144192A2009-07-02
JP2000124209A2000-04-28
Attorney, Agent or Firm:
Shunichi Yoshimura