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Title:
FILTER DEVICE, ILLUMINATING SYSTEM, EXPOSURE APPARATUS, AND MANUFACTURING METHOD OF DEVICE
Document Type and Number:
Japanese Patent JP2010097128
Kind Code:
A
Abstract:

To provide a filter device which can control illuminating light radiated to an object to achieve a desired illumination distribution.

The filter device includes: a filter element to change the incident light intensity depending on the incident angle and position; and a filter driver to change at least either the incident angle or incident position of the entering light by moving the filter element with respect to the light incident to the filter element.


Inventors:
KOYAMA MOTOO
Application Number:
JP2008269828A
Publication Date:
April 30, 2010
Filing Date:
October 20, 2008
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G03F7/20; G02B5/00; G02B7/00; G02B19/00
Domestic Patent References:
JP2006059834A2006-03-02
JPH08220318A1996-08-30
JP2007158225A2007-06-21
JP2008153561A2008-07-03
JP2006203217A2006-08-03
JP2006178395A2006-07-06
JP2003315690A2003-11-06
JPH05257068A1993-10-08
JPH09127418A1997-05-16
JP2003092253A2003-03-28
JP2006059834A2006-03-02
JPH08220318A1996-08-30
JP2007158225A2007-06-21
JP2008153561A2008-07-03
JP2006203217A2006-08-03
JP2006178395A2006-07-06
JP2003315690A2003-11-06
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Kazuya Nishi



 
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