Title:
FILTER DEVICE AND METHOD FOR PROTECTING VACUUM PUMP SYSTEM BY THE SAME
Document Type and Number:
Japanese Patent JP3433998
Kind Code:
B2
Abstract:
PURPOSE: To prevent the deterioration and the lowering of the function of a vacuum pump for a long time and to markedly prolong the period till a time when its maintenance is required by disposing a filter medium bed consisting of corrosion resistant fiber in a bent gas passage of a triple construction and specifying a conductance value.
CONSTITUTION: This filter device has a triple construction in which an outer duct, an intermediate duct and a waste gas introducing inner duct are approximately coaxially arranged. An annular space is formed between the inner duct and the intermediate duct, and an annular space between the intermediate duct and the outer duct has a larger diameter than the former. In the annular space having the relatively small diameter, a filter bed 4 consisting of metal fiber inserted between perforated plates 3, 3 is disposed. The removal efficiency of particles, reactioned products, volatile solid materials, etc., in waste gas is improved by increasing the packing density of the metal fiber, but the conductance is also reduced to lower the exhaust velocity of a vacuum pump. Thus, the packing density is selected so that the conductance may be 0.1-10 times the exhaust velocity of the vacuum pump.
Inventors:
Akira Baba
Moriyuki Fukushima
Moriyuki Fukushima
Application Number:
JP1189994A
Publication Date:
August 04, 2003
Filing Date:
February 03, 1994
Export Citation:
Assignee:
Kanto Denka Kogyo Co., Ltd.
International Classes:
B01D45/08; B01D50/00; H01L21/302; H01L21/3065; B01D46/30; (IPC1-7): B01D50/00; B01D45/08; B01D46/30
Domestic Patent References:
| JP3229414A | ||||
| JP63209727A | ||||
| JP57146329U |
Attorney, Agent or Firm:
Kazuo Shamoto (5 outside)