Title:
フィルタウェッティング方法及び処理液供給装置
Document Type and Number:
Japanese Patent JP7161955
Kind Code:
B2
Abstract:
The present invention relates to a filter wetting method to prevent bubbles included in a treatment liquid from bursting in a filter, and a treatment liquid supply apparatus. According to the present invention, in the filter wetting method, a filter removes foreign matter from a treatment liquid and is installed in a treatment liquid supply apparatus supplying the treatment liquid to a treatment liquid discharge unit for discharging the treatment liquid to an object to be treated. The treatment liquid supply apparatus comprises a temporary retention unit temporarily storing the treatment liquid and a pump pumping, to the treatment liquid discharge unit, the treatment liquid from which the foreign matter is removed by the filter. In the temporary retention unit, a retention chamber storing the treatment liquid and an operational fluid chamber disposed outside the retention chamber are spaced apart by a flexible member and the pressure inside the retention chamber is controlled in accordance with a pressure change inside the operational fluid chamber, such that the treatment liquid is supplemented to or pumped from the corresponding retention chamber. Moreover, the filter wetting method comprises: a deaeration process of forming a negative pressure in the retention chamber of the temporary retention unit to deaerate the treatment liquid stored in the corresponding retention chamber when a pipe between the temporary retention unit and the filter is closed; and a liquid communication process of allowing a deaerated liquid, which is the deaerated treatment liquid, to communicate with the filter.
Inventors:
Hideo Shite
Kenji Adachi
Masato Imamura
Nozomi Kanetake
Takuya Tajiri
Kenji Adachi
Masato Imamura
Nozomi Kanetake
Takuya Tajiri
Application Number:
JP2019028579A
Publication Date:
October 27, 2022
Filing Date:
February 20, 2019
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/027; B01D19/00; B01D37/04; B05C11/10
Domestic Patent References:
| JP2018046269A | ||||
| JP2018201014A | ||||
| JP11128817A | ||||
| JP2011101851A |
Attorney, Agent or Firm:
Kanemoto Tetsuo
Koji Hagiwara
Naoki Ogita
Takashi Saito
Takuya Mine
Koji Hagiwara
Naoki Ogita
Takashi Saito
Takuya Mine