Title:
検査装置および検査方法
Document Type and Number:
Japanese Patent JP7161956
Kind Code:
B2
Abstract:
In order to inspect, with a high inspection efficiency, a workpiece serving as an inspection target, the present invention is provided with: a line imaging unit that acquires a line image by imaging, at a workpiece holding position, a linear region radially extending from a portion positioned on a symmetric axis in the workpiece held by a workpiece holding unit; a determination unit that determines, before the movement of the workpiece from the workpiece holding position to an inspection position, whether the workpiece held by the workpiece holding unit is an inspection target or not on the basis of the line image acquired by the line imaging unit; and a inspection control unit that restricts the movement and inspection of the workpiece held by the workpiece holding unit toward the inspection position when the workpiece held by the workpiece holding unit is not determined to be an inspection target.
Inventors:
Tsutomu Sakuyama
Application Number:
JP2019030650A
Publication Date:
October 27, 2022
Filing Date:
February 22, 2019
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
G01N21/95; G01N21/84
Domestic Patent References:
| JP7190958A | ||||
| JP2013210231A | ||||
| JP2000259830A |
Foreign References:
| WO2018168065A1 | ||||
| KR1020130029469A | ||||
| US5452521 |
Attorney, Agent or Firm:
Swing angle Shoichi
Kazumasa Onishi
Kazumasa Onishi
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