FIN-TYPE CAPACITOR AND ITS MANUFACTURE - Samsung Electronics Co.,Ltd.

Title:

FIN-TYPE CAPACITOR AND ITS MANUFACTURE

Document Type and Number:

Japanese Patent JP3936410

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To provide a fin type capacitor which can increase the capacitance and its manufacture.
SOLUTION: This fin type capacitor is constituted, including the first electrode and the second electrode where the first substance layers 112a, 112b, and 112c constituted of conductive oxides and the second substance layers 114a and 114b constituted of conductors are stacked alternately and flanks of the second substances 114a and 114b are recessed inward to form the fin structure, and dielectric substance 18 which is made between the first electrode and the second electrode.

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Inventors:

Ginger chang tin

Application Number:

JP25797295A

Publication Date:

June 27, 2007

Filing Date:

October 04, 1995

Export Citation:

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Assignee:

Samsung Electronics Co.,Ltd.

International Classes:

H01L21/8242; H01L27/04; H01L21/02; H01L21/822; H01L21/8246; H01L27/105; H01L27/108; (IPC1-7): H01L27/108; H01L21/8242; H01L27/04; H01L21/822

Domestic Patent References:

JP5218334A
JP5198768A
JP5152539A
JP6204431A
JP6068529A
JP5055514A
JP5299601A

Attorney, Agent or Firm:

Mikio Hatta
Atsushi Nogami

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