Title:
微調整ネジおよび加工装置
Document Type and Number:
Japanese Patent JP7393977
Kind Code:
B2
Abstract:
A fine adjustment thread assembly couples a first part and a second part to each other while keeping the first part and the second part spaced apart, adjusts the distance between the first part and the second part, and detects a load applied to the second part. The assembly includes first external threads that can be brought into threaded engagement with first internal threads formed in the first part, second external threads that are axially spaced from the first external threads, that have a thread pitch different from that of the first internal thread, and that can be brought into threaded engagement with second internal threads formed in the second part. A joint portion between the first external threads and the second external threads houses a load sensor under a compressive load.
Inventors:
Toshiyasu Rikiishi
Kentaro Wada
Kentaro Wada
Application Number:
JP2020034780A
Publication Date:
December 07, 2023
Filing Date:
March 02, 2020
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B49/10; B24B7/04; B24B41/06; G01L5/00; H01L21/304
Domestic Patent References:
| JP2016203290A | ||||
| JP201815823A | ||||
| JP890376A | ||||
| JP2010216804A |
Foreign References:
| WO2016159245A1 | ||||
| US20070017295 |
Attorney, Agent or Firm:
Patent Attorney Corporation Tokyo Alpa Patent Office