To provide a flexible TFT substrate in which a desired organic TFT element is formed on a plastic film without causing any trouble and a highly reliable organic TFT element having high performance is disposed.
The flexible TFT substrate has the following constituents sequentially formed on the plastic film 20, i.e., an adhesive layer 46; a lower insulating layer 44; TFTs 5, 6 consisting of organic active layers 38a, 38b, source electrodes 36a, 36x, drain electrodes 36b, 36y, a gate insulating layer 34 and gate electrodes 32a, 32b and embedded in the lower insulating layer 44. The gate insulating layer 34 of the TFTs 5, 6 is made of a metal oxide layer (tantalum oxide layer) obtained by anodic oxidation for the uppermost layer of a metal pattern layer (tantalum pattern layer) constituting the gate electrodes 32a, 32b.
TOKITO SHIZUO
YAMAMOTO TOSHIHIRO
NAKAJIMA YOSHIKI
FUJISAKI YOSHIHIDE
TAKEI TATSUYA
MIZUKAMI MAKOTO
JAPAN BROADCASTING CORP
VICTOR COMPANY OF JAPAN
JP2001356370A | 2001-12-26 | |||
JP2003255857A | 2003-09-10 | |||
JP2003298067A | 2003-10-17 | |||
JP2003229435A | 2003-08-15 | |||
JP2004349539A | 2004-12-09 | |||
JP2005311325A | 2005-11-04 | |||
JP2006332613A | 2006-12-07 | |||
JP2001356370A | 2001-12-26 | |||
JP2003255857A | 2003-09-10 | |||
JP2003298067A | 2003-10-17 | |||
JP2003229435A | 2003-08-15 | |||
JP2004349539A | 2004-12-09 | |||
JP2005311325A | 2005-11-04 | |||
JP2006332613A | 2006-12-07 |
WO2005093695A1 | 2005-10-06 | |||
WO2005093695A1 | 2005-10-06 |