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Title:
FLEXIBLE TFT SUBSTRATE, MANUFACTURING METHOD THEREOF AND FLEXIBLE DISPLAY
Document Type and Number:
Japanese Patent JP2008159935
Kind Code:
A
Abstract:

To provide a flexible TFT substrate in which a desired organic TFT element is formed on a plastic film without causing any trouble and a highly reliable organic TFT element having high performance is disposed.

The flexible TFT substrate has the following constituents sequentially formed on the plastic film 20, i.e., an adhesive layer 46; a lower insulating layer 44; TFTs 5, 6 consisting of organic active layers 38a, 38b, source electrodes 36a, 36x, drain electrodes 36b, 36y, a gate insulating layer 34 and gate electrodes 32a, 32b and embedded in the lower insulating layer 44. The gate insulating layer 34 of the TFTs 5, 6 is made of a metal oxide layer (tantalum oxide layer) obtained by anodic oxidation for the uppermost layer of a metal pattern layer (tantalum pattern layer) constituting the gate electrodes 32a, 32b.


Inventors:
FURUKAWA TADAHIRO
TOKITO SHIZUO
YAMAMOTO TOSHIHIRO
NAKAJIMA YOSHIKI
FUJISAKI YOSHIHIDE
TAKEI TATSUYA
MIZUKAMI MAKOTO
Application Number:
JP2006348405A
Publication Date:
July 10, 2008
Filing Date:
December 25, 2006
Export Citation:
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Assignee:
KYODO PRINTING CO LTD
JAPAN BROADCASTING CORP
VICTOR COMPANY OF JAPAN
International Classes:
H01L21/336; G02F1/1345; G02F1/1368; H01L21/02; H01L21/316; H01L27/12; H01L29/786; H01L51/05; H01L51/50; H05B33/02; H05B33/12
Domestic Patent References:
JP2001356370A2001-12-26
JP2003255857A2003-09-10
JP2003298067A2003-10-17
JP2003229435A2003-08-15
JP2004349539A2004-12-09
JP2005311325A2005-11-04
JP2006332613A2006-12-07
JP2001356370A2001-12-26
JP2003255857A2003-09-10
JP2003298067A2003-10-17
JP2003229435A2003-08-15
JP2004349539A2004-12-09
JP2005311325A2005-11-04
JP2006332613A2006-12-07
Foreign References:
WO2005093695A12005-10-06
WO2005093695A12005-10-06
Attorney, Agent or Firm:
Keizo Okamoto



 
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