To provide a flow control valve of cathode gas which can maintain a freezing/fixing prevention performance for an extended period.
The flow control valve includes a valve body in which a cathode flow path 42 through which cathode gas flows and a shaft hole which communicates with the cathode flow path 42 are formed, a valve disk that is provided in the cathode flow path 42 and changes an opening area of the cathode flow path 42, and a shaft 46 which is provided by being inserted in the shaft hole to drive the valve. A fluororesin coating layer is formed on the inner peripheral surface of a shaft enclosure part 475 of the shaft hole of the valve body, and a fluororesin composite electroless nickel plating layer is formed on the outer peripheral surface of the shaft 46.
JPS5356722 | SPECIAL VALVE |
NUMATA HIDEO
JP2009299879A | 2009-12-24 | |||
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Hayashi Ichiyoshi
Hiroaki Hoshino