To actualize a low-cost flow meter for directly detecting a flow rate by solving a problem on a flow meter depending on conventional art.
This flow meter uses one differential pressure gage using metallic diaphragms and an orifice 6 exchangeable according to the range of flow to be measured. With respect to a disk-shaped ceramic electrode 1 with metallic electrode surfaces formed on both of the upper and lower surfaces, the pressure gage is structured so that the set of diaphragms 2a and 2b made of metal are held opposite to the ceramic electrode with equal intervals kept from the electrode surfaces of the ceramic electrode. The pressure gage of the above structure is disposed in a fluid passage including the orifice so that fluid pressures upstream and downstream the orifice act on respective fluid contact surfaces of the set of diaphragms made of metal. A flow rate is measured by detecting a differential pressure through a change in capacitance between each diaphragm and each ceramic electrode surface.
| JPH102770A | 1998-01-06 | |||
| JP2003337053A | 2003-11-28 | |||
| JPS52117173A | 1977-10-01 | |||
| JPH02264839A | 1990-10-29 |
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
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