To enable measurement of flow rate distribution ratio without breaking an inspection object and determination of individual difference between inspected bodies using it, under a condition where data related to the flow channel resistance of a plurality of internal flow channels of the inspection objects can be unclear or the data can change.
In a method of non-destructively determining individual difference in the inspection object having the plurality of internal flow channels, the fluid of which flow rate is changed gradually is made to flow in each flow channel, variation of pressure difference between fluid in the flow channel inlet and fluid in the flow channel outlet accompanying variation in flow rate at this time is measured, the characterization factor of the internal flow channel is determined based on the relation between the flow rate and the pressure difference, the flow rate distribution ratio every flow channel is determined based on the ratio of the characterization factor, and the individual difference between the same kind of inspected bodies is determined.
| JP2003506703 | [Title of Invention] Microsensor Housing |
| WO/1996/021182 | FLOW CONTROLLER, PARTS OF FLOW CONTROLLER, AND RELATED METHOD |
| WO/1989/012802 | MASS-VOLUME FLOWMETER |
TAKAHASHI TOSHIHIKO
FUJIOKA TERUTAKA
