Title:
FLUID BODY FEEDER
Document Type and Number:
Japanese Patent JP3307980
Kind Code:
B2
Abstract:
PURPOSE: To provide a fluid body feed technique where a fluid body is accurately fed with a fixed quantity and given suck-back with a fixed quantity in a state of cleanliness and high purity while precisely controlling feed speed and such-back speed and the soiling of a drop nozzle and the sagging of liquid are prevented from occurring.
CONSTITUTION: A component operation control part 8 for combining both operating timing and operating speed to control the components is provided for the fluid feed control components of a fluid body feed function part 2, a fluid body feed stop valve function part 3 and a fluid run preventive function part 7 to precisely control the feed/feed stop operation of a fluid body 1 to a drop nozzle 4 and suck-back operation.
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Inventors:
Haruo Amada
Application Number:
JP9519492A
Publication Date:
July 29, 2002
Filing Date:
April 15, 1992
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
B01F15/02; B01J4/02; B05B1/30; B05C5/00; B05C11/10; H01L21/027; (IPC1-7): H01L21/027; B01J4/02; B05C5/00; B05C11/10
Domestic Patent References:
| JP1288361A |
Attorney, Agent or Firm:
Yamato Tsutsui
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