Title:
FLUID CONCENTRATION CONTROL METHOD AND FLUID CONCENTRATION CONTROL EQUIPMENT USING THIS METHOD
Document Type and Number:
Japanese Patent JP3234112
Kind Code:
B2
Abstract:
PURPOSE: To provide a fluid concentration control method capable of easily calibrating and having high accuracy and provide fluid concentration control equipment using this method.
CONSTITUTION: Pure water is passed through a sample cell 12, and a measuring controller 31 adjusts the temperature of the pure water to a specified temperature through a temperature adjusting part 32. A first calibrated transmitted light intensity and reference transmitted light intensity of a reference cell 14 are measured. The temperature of the pure water is adjusted to a temperature different from this temperature through the temperature adjusting part 32. In this state, a second calibrated transmitter light intensity of the cell 12 and reference transmitted light intensity of the reference cell 14 are measured. The difference between the logarithm of the ratio of the first transmitted light intensity to the reference transmitted light intensity (first calibrated absorbance) and the logarithm of the ratio of the second calibrated transmitted light intensity to the reference transmitted light intensity (second calibrated absorbance) is found, and offset calibration factor is found on the basis of the ratio of the difference obtained to the difference between two reference values previously set (gain calibration factor) and the difference between the first calibrated absorbance and the reference value on one side, and in the concentration adjustment of a treatment solution, the absorbance is corrected by these two calibration factors.
Inventors:
Kazuo Nakajima
Application Number:
JP29213694A
Publication Date:
December 04, 2001
Filing Date:
October 31, 1994
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
G01N21/59; (IPC1-7): G01N21/59
Domestic Patent References:
| JP5249040A | ||||
| JP5264452A | ||||
| JP3172738A | ||||
| JP63274841A | ||||
| JP61282532A | ||||
| JP553241U |