Title:
流体制御装置
Document Type and Number:
Japanese Patent JP6912004
Kind Code:
B2
Abstract:
A pump (10) includes a vibrating plate (11), a flow path forming member (15), a pump chamber (101), and a film valve (13). The vibrating plate (11) is provided with a piezoelectric element (12), vibrates due to distortion of the piezoelectric element (12), and has a gap (114) on an outer periphery. The flow path forming member (15) is disposed so as to face the vibrating plate (11), and has a hole (151) in a portion facing the vibrating plate (11). The pump chamber (101) is surrounded by the vibrating plate (11) and the flow path forming member (15), and has a central space communicating with the hole (151) and an outer edge space communicating with the gap (114). The film valve (13) is disposed in the pump chamber (101). The film valve (13) is in contact with the vibrating plate (11) and the flow path forming member (15) when a pressure in the central space is lower than a pressure in the outer edge space.
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Inventors:
Shin Tanaka
Masaaki Fujisaki
Masaaki Fujisaki
Application Number:
JP2020521743A
Publication Date:
July 28, 2021
Filing Date:
March 26, 2019
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
F04B45/04; F04B45/047; F16K7/17; F16K15/14
Domestic Patent References:
| JP2016113953A | ||||
| JP2010223218A | ||||
| JP2004353638A | ||||
| JP58061372A |
Foreign References:
| WO2017038565A1 | ||||
| WO2016063711A1 | ||||
| WO2014148103A1 | ||||
| WO2008090725A1 | ||||
| US20150023821 | ||||
| CN206477983U |
Attorney, Agent or Firm:
Kaede International Patent Office