Title:
FLUID CONTROL SYSTEM AND VALVE USED IN IT
Document Type and Number:
Japanese Patent JP3452695
Kind Code:
B2
Abstract:
PURPOSE: To correctly control various kinds of fluids by providing a main control line and plural branch control lines for supplying several kinds of fluids to a processor, and forming the valve interposed in each branch control line by a fluid driven valve and a solenoid valve for controlling the flow of a working fluid.
CONSTITUTION: There are provided a main control line L and plural branch control lines L1∼L5 for supplying several kinds of fluids G1∼G5 into a process chamber for processing a wafer, which is a processor C, and a valve V for switching a fluid is interposed in each branch control line L1∼L5. Each valve V comprises a fluid driven valve V' including a fluid pressure actuator 1 and a solenoid valve V" integrally fitted to the valve V' to supply a working fluid A to the fluid pressure actuator 1. Thus, when the solenoid valve V" is opened, immediately the working fluid A can be supplied to the fluid driven valve V' to ensure quick operation of the valve V.
Inventors:
Tadahiro Ohmi
Michio Yamaji
Shinichi Ikeda
Yuji Karado
Michio Yamaji
Shinichi Ikeda
Yuji Karado
Application Number:
JP17837495A
Publication Date:
September 29, 2003
Filing Date:
July 14, 1995
Export Citation:
Assignee:
Tadahiro Ohmi
Fujikin Co., Ltd.
Fujikin Co., Ltd.
International Classes:
F16K31/42; F16K31/06; (IPC1-7): F16K31/42; F16K31/06
Domestic Patent References:
| JP6294472A | ||||
| JP6281112U | ||||
| JP61164022U | ||||
| JP5584360U | ||||
| JP4717388Y1 |
Attorney, Agent or Firm:
Takeo Sugimoto