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Patent Searching and Data


Title:
FLUID CONTROLLER
Document Type and Number:
Japanese Patent JPH03163277
Kind Code:
A
Abstract:

PURPOSE: To stabilize the secondary side pressure and obtain a small-sized device by installing a cutoff valve, first and second control valves in a main passage, lowering the primary side pressure in two stages and controlling the second control valve by the secondary side pressure and the intermediate pressure.

CONSTITUTION: In an ordinary state, a cut-off valve 4, the first and second control valve 5 and 6 are opened, and the gas supplied from an inlet 2a obtains a prescribed intermediate side pressure, passing through a port 4a and a port 5a. Further, a diaphragm 5c is moved vertically according to the primary side pressure by the control valve 5, and the intermediate side pressure is made constant. Then, the gas is controlled to a prescribed pressure through the passing through a port 6a. Since, at this time, the diaphragm 10b of a servoregulator 10 lowers, the intermediate side pressure is transmitted to a working pressure chamber 10h, and the diaphragm 6c is controlled i n the vertical direction, and the secondary side pressure is made constant. When the secondary side pressure increases abnormally, the cut-off valve 4 is closed, and safety is secured, and whole of the device can be made small-sized.


Inventors:
MOROZUMI EIICHI
TSUMURA TAKASHI
Application Number:
JP29890989A
Publication Date:
July 15, 1991
Filing Date:
November 17, 1989
Export Citation:
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Assignee:
YAMATAKE HONEYWELL CO LTD
International Classes:
F16K17/30; F23N1/00; (IPC1-7): F16K17/30; F23N1/00
Attorney, Agent or Firm:
Hiroaki Tazawa (1 person outside)