Title:
含フッ素重合性単量体、含フッ素高分子化合物、それらを用いたレジスト材料
Document Type and Number:
Japanese Patent JP4410471
Kind Code:
B2
Abstract:
The invention relates to a fluorine-containing compound containing a substituent represented by the formula 1: where R1 is (a) a straight-chain alkylene group, (b) a branched alkylene group, (c) a cyclic structure containing an aromatic ring group or aliphatic cyclic group, or (d) a substituent containing an aromatic ring group and an aliphatic cyclic group, and R1 optionally contains fluorine, another halogen, CN, oxygen, nitrogen, silicon, or alcohol, and R2 is a hydrogen atom, a straight-chain or branched alkyl group, an aromatic group, or a hydrocarbon group optionally containing an aliphatic cyclic group, and R2 optionally contains fluorine, oxygen, nitrogen, carbonyl bond, or alcohol, and a plural number of R2 having different structures are optionally contained in the molecule.
Inventors:
Tadashi Narita
Kazuhiko Maeda
Kazuhiko Maeda
Application Number:
JP2003004262A
Publication Date:
February 03, 2010
Filing Date:
January 10, 2003
Export Citation:
Assignee:
Central Glass Co., Ltd.
International Classes:
C07C69/78; G03F7/004; C07C31/20; C07C31/44; C07C33/48; C07C43/178; C07C43/23; C07C69/65; C07C69/653; C07D319/12; C08F14/18; C08F16/26; C08F20/28; G03F7/038; G03F7/039
Domestic Patent References:
| JP9006008A | ||||
| JP2002090997A | ||||
| JP2001350264A | ||||
| JP58215411A | ||||
| JP2002080429A |
Foreign References:
| WO2002073316A1 | ||||
| WO2001074916A1 |
Other References:
Fujiwara, H. et al.,Macromolecular Chemistry and Physics,2002年,Vol.203, No.16,p.2357-2368
Narita, T. et al.,Journal of Fluorine Chemistry,2002年,Vol.117, No.1,p.55-61
Narita, T. et al.,Macromolecular Rapid Communications,1998年,Vol.19, No.9,p.485-491
Narita, T. et al.,Macromolecular Chemistry and Physics,2000年,Vol.201, No.2,p.220-225
Qian, C. et al.,Organic Syntheses ,1999年,Vol.76,p.151-158
Narita, T. et al.,Tetrahedron Letters,1995年,Vol.36, No.34,p.6091-4
Narita, T. et al.,Journal of Fluorine Chemistry,2002年,Vol.117, No.1,p.55-61
Narita, T. et al.,Macromolecular Rapid Communications,1998年,Vol.19, No.9,p.485-491
Narita, T. et al.,Macromolecular Chemistry and Physics,2000年,Vol.201, No.2,p.220-225
Qian, C. et al.,Organic Syntheses ,1999年,Vol.76,p.151-158
Narita, T. et al.,Tetrahedron Letters,1995年,Vol.36, No.34,p.6091-4
Attorney, Agent or Firm:
Yoshiaki Hanada