Title:
フッ素モニターを有するフッ素制御システム
Document Type and Number:
Japanese Patent JP3880314
Kind Code:
B2
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Inventors:
Gon Mention
Watson Tom Ay
Das Palashpee
Sandstrom Richard El
Duffy Thomas Peas
Watson Tom Ay
Das Palashpee
Sandstrom Richard El
Duffy Thomas Peas
Application Number:
JP2000529776A
Publication Date:
February 14, 2007
Filing Date:
January 19, 1999
Export Citation:
Assignee:
Cymer, Inc.
International Classes:
H01S3/134; G03F7/20; H01S3/036; H01S3/225
Domestic Patent References:
| JP6275902A | ||||
| JP5347448A | ||||
| JP7181134A | ||||
| JP9141461A | ||||
| JP639183A | ||||
| JP63142236A |
Foreign References:
| US4959840 |
Other References:
Applied Optics(1975)Vol.14 No.8 p.1960-1976
Applied Physics(1980)Vol.23 No.3 p.319-326
Applied Physics(1980)Vol.23 No.3 p.319-326
Attorney, Agent or Firm:
Minoru Nakamura
Fumiaki Otsuka
Sadao Kumakura
Shishido Kaichi
Toshio Imajo
Nobuo Ogawa
Village shrine Atsuo
Takaki Nishijima
Atsushi Hakoda
Fumiaki Otsuka
Sadao Kumakura
Shishido Kaichi
Toshio Imajo
Nobuo Ogawa
Village shrine Atsuo
Takaki Nishijima
Atsushi Hakoda