Title:
FOREIGN MATTER REMOVING APPARATUS AND FOREIGN MATTER REMOVING METHOD
Document Type and Number:
Japanese Patent JP2013116452
Kind Code:
A
Abstract:
To provide a foreign matter removing apparatus and a foreign matter removing method, which easily removes a foreign matter residue adhered on a tip of a member for foreign matter removal and prevents the foreign matter residue from falling down on a substrate, resulting in re-adhering.
There is provided the foreign matter removing apparatus for removing the foreign matter adhered on the substrate using a tip of a needle, which includes a residue removing mechanism for removing the foreign matter residue adhered on the tip.
Inventors:
SHIMIZU SHIGEO
Application Number:
JP2011265687A
Publication Date:
June 13, 2013
Filing Date:
December 05, 2011
Export Citation:
Assignee:
NTN TOYO BEARING CO LTD
International Classes:
B08B1/00; B08B5/00; B08B5/04; G02F1/13; H05K3/26
Domestic Patent References:
JP2010232526A | 2010-10-14 | |||
JP2008209544A | 2008-09-11 | |||
JP2008107467A | 2008-05-08 | |||
JP2001326258A | 2001-11-22 | |||
JP2005033072A | 2005-02-03 | |||
JP2008108959A | 2008-05-08 | |||
JPH08250557A | 1996-09-27 | |||
JPH08254817A | 1996-10-01 | |||
JP2009265176A | 2009-11-12 | |||
JP2005033072A | 2005-02-03 | |||
JP2008108959A | 2008-05-08 | |||
JPH08250557A | 1996-09-27 | |||
JPH08254817A | 1996-10-01 | |||
JP2009265176A | 2009-11-12 | |||
JP2010232526A | 2010-10-14 | |||
JP2008209544A | 2008-09-11 | |||
JP2008107467A | 2008-05-08 | |||
JP2001326258A | 2001-11-22 |
Attorney, Agent or Firm:
Fukami patent office