Title:
FORMATION OF HARD CARBON FILM
Document Type and Number:
Japanese Patent JP3781141
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To form a hard carbon film having satisfactory hardness and durability at a high rate of film formation by decomposing a thermodynamically unstable compd. and bonding decomposed products.
SOLUTION: A thermodynamically unstable compd. having an optionally substd. hydrocarbon group is decomposed to generate carbon radicals and the objective hard carbon film is formed by bonding the carbon radicals. It is preferable that the hydrocarbon group has plural carbon atoms and the bond angle between the carbon atoms deviates from the proper bond angle or the hydrocarbon group has plural carbon atoms bonded to each other through an unsatd. bond or has a single carbon atoms bonded to other atom through an unsatd. bond capable of forming a resonance structure. The generated carbon radicals are preferably carbene. The unstable compd. is decomposed preferably by the plasma CVD method.
Inventors:
Kawashima Atsudo
Shunji Amano
Sadaharu Honjo
Hiroshi Hayashi
Seiichi Miyai
Shunji Amano
Sadaharu Honjo
Hiroshi Hayashi
Seiichi Miyai
Application Number:
JP35070796A
Publication Date:
May 31, 2006
Filing Date:
December 27, 1996
Export Citation:
Assignee:
ソニー株式会社
International Classes:
C01B31/06; C30B29/04; C23C16/26; C23C16/27; C23C16/50; G11B5/72; G11B5/84; (IPC1-7): C30B29/04; C01B31/06; C23C16/26; C23C16/50; G11B5/84; //G11B5/72
Domestic Patent References:
| JP62103367A | ||||
| JP61127896A | ||||
| JP2116609A | ||||
| JP1261299A | ||||
| JP5155690A |
Attorney, Agent or Firm:
Hiroshi Osaka