Title:
FORMATION OF OXIDE SUPERCONDUCTING POLYCRYSTAL THIN FILM
Document Type and Number:
Japanese Patent JPH02279597
Kind Code:
A
Abstract:
PURPOSE:To obtain the oxide superconducting polycrystal thin film which is controlled in particle size, grain size distribution, crystal orientation or the like by previously forming plural pieces of the seed crystals of an oxide superconductor on a substrate and growing the crystal of the oxide superconductor on the substrate with the seed crystals an nuclei. CONSTITUTION:An amorphous thin film 1 consisting of an oxide superconductor (e.g; YBa2Cu3Ox) is formed on a substrate 2 and is heat-treated to form the plural seed crystals 3 in the form of islands on the substrate 2. The amorphous thin film 4 of the oxide superconductor is then formed thereon and is heat- treated in an oxygen-contg. atmosphere to grow the crystal of the oxide superconductor on the substrate 2 with the seed crystals 3 as nuclei. A single-layered polycrystal thin film 5 det ermined with the particle size and grain size distributions of the grown crystal particles is formed in accordance with the crystal disposition and bearing of the seed crystals 3. The oxide superconducting polycrystal thin film which can be utilized for Josephson devices or the like is thereby obtd.
Inventors:
ITO TADATSUGU
NAGATA HIROTOSHI
NAGATA HIROTOSHI
Application Number:
JP9630989A
Publication Date:
November 15, 1990
Filing Date:
April 18, 1989
Export Citation:
Assignee:
SUMITOMO CEMENT CO
ITO TADATSUGU
ITO TADATSUGU
International Classes:
C30B28/02; C30B29/22; H01B13/00; (IPC1-7): C30B28/02; C30B29/22; H01B13/00
Domestic Patent References:
| JPH02197179A | 1990-08-03 | |||
| JPH01224297A | 1989-09-07 |
Attorney, Agent or Firm:
Kuramochi Yu