Title:
FURNACE CORE TUBE
Document Type and Number:
Japanese Patent JPH02279598
Kind Code:
A
Abstract:
PURPOSE:To improve the strength of a silicon furnace core tube to pickling and to suppress the diffusion of the impurities from the inside wall of the furnace core tube so as to provide the furnace core tube adequate to production of semiconductor devices by coating the inside wall of the furnace core tube with a diamond thin film. CONSTITUTION:The inside of a silicon furnace core tube 1 sealed at both ends is evacuated by a vacuum pump 14. Gaseous CH4, gaseous Xe, gaseous Kr or the like are introduced from gas cylinders 3A, 3B, 3C into the furnace core tube 1 at prescribed flow rates. High frequencies are supplied to an induction coil 10 by a high frequency oscillator 11 to generate a discharge and the inside surface of the surface core tube 1 is coated with a diamond thin film by the sputtering with the formed carbon ions onto the inside wall of the furnace core tube 1. The erosion of the coated thin film is obviated in this way even if the furnace core tube 1 is pickled by nitric acid or the like and, therefore, the thermal diffusion of metals, such as iron and nickel, existing as impurities in the silicon furnace core tube 1 is obviated.
Inventors:
HAYANO HIDEAKI
Application Number:
JP9951989A
Publication Date:
November 15, 1990
Filing Date:
April 18, 1989
Export Citation:
Assignee:
NEC CORP
International Classes:
C30B29/04; C23C16/26; C23C16/27; C30B31/10; H01L21/205; H01L21/31; (IPC1-7): C23C16/26; C30B29/04; C30B31/10; H01L21/205; H01L21/31
Attorney, Agent or Firm:
Uchihara Shin
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