Title:
FORMATION OF SUPERCONDUCTING FILM
Document Type and Number:
Japanese Patent JPH05139705
Kind Code:
A
Abstract:
PURPOSE: To form a smooth oxide superconducting film excellent in superconducting characteristics.
CONSTITUTION: A film forming device is divided into a film forming chamber 1 in which a film is formed with excited metal atoms or excited fine particles generated from a target 5 and an oxidation chamber 2 to be filled with excited oxygen from an oxygen generating source so that an oxidized film is formed by transferring a substrate 4 heated with a heater 3 between the chambers 1, 2. An oxide superconducting film and an oxidized film excellent in smoothness can be formed and can be applied to an electronic device. Since an oxide superconducting film can be formed on a long-sized substrate, a superconducting coil can be produced.
Inventors:
NAMATAME TOSHIHIDE
SAITO YUKIO
KAMO YUICHI
SAITO YUKIO
KAMO YUICHI
Application Number:
JP30449291A
Publication Date:
June 08, 1993
Filing Date:
November 20, 1991
Export Citation:
Assignee:
HITACHI LTD
International Classes:
C01B13/14; C01G1/00; C01G3/00; C23C14/08; C23C14/22; C23C14/56; H01L21/203; H01L21/31; (IPC1-7): C01B13/14; C01G1/00; C01G3/00; C23C14/08; C23C14/22; C23C14/56; H01L21/203; H01L21/31
Attorney, Agent or Firm:
Ogawa Katsuo