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Title:
FORMING METHOD OF BLACK OXIDE FILM OF COLOR SELECTION ELECTRODE STRUCTURE
Document Type and Number:
Japanese Patent JP2001351515
Kind Code:
A
Abstract:

To provide a forming method of a black oxide film capable of preventing deterioration in tension of a color selection electrode structure to which the tension in the slit extension direction is applied.

The forming method of the black oxide contains a heating process for heating the color selection electrode structure using an aperture grille to 400°C in the atmosphere of mixed gas obtained by mixing 8-12 volume% air to exothermic converted gas having the specified composition; a temperature keeping process for heating the color selection electrode structure of 400°C to 460°C in the atmosphere of only the exothermic converted gas and then keeping at 460°C for about 15 minutes; and a cooling process for cooling the color selection electrode structure of 460°C to 200°C in the atmosphere of mixed gas obtained by mixing 5-15 volume% air to the exothermic converted gas.


Inventors:
TAKEOKA KUNIO
Application Number:
JP2000174269A
Publication Date:
December 21, 2001
Filing Date:
June 09, 2000
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
C23C8/18; H01J9/14; (IPC1-7): H01J9/14; C23C8/18
Attorney, Agent or Firm:
Masuo Oiwa