To provide a manufacturing method for a field emission cathode capable of increasing brightness and narrowing the spread of electron beams.

This manufacturing method for a field emission cathode is composed of a process for forming plural emitter tips on a substrate; a process for forming a first insulating layer; a process for forming a gate electrode; a process for forming a gate opening part by etching the gate electrode over the emitter tips; a process for forming a second insulating layer; a process for forming a focusing electrode; a process for forming a first opening part of the focusing electrode larger than the opening diameter of the gate opening part; and an opening process etching the first insulating layer and the second insulating layer within the first opening part so that tips of the emitter tips are exposed, and the opening process is composed of a process for forming a second opening part smaller than the opening diameter of the first opening part, over the first opening part; and a process for etching the second and the first insulating layers within the first opening part through the second opening part.