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Title:
FORMING METHOD OF RESIST PATTERN, WIRING FORMING METHOD AND ELECTRONIC COMPONENT
Document Type and Number:
Japanese Patent JP2003158062
Kind Code:
A
Abstract:

To provide a forming method of a resist pattern wherein a sectional form is an overhang type, resistance to heat is high, and easy elimination by organic solvent is enabled after thermal load is applied, and to provide a wiring forming method using the forming method of a resist pattern, and an electronic component provided with a metal wiring formed by using the wiring forming method.

On a substrate 1, a first resist layer 11 is formed which can be dissolved by developer for a second resist layer 12 and has resistance to heat and strippability. On the first resist layer 11, a second resist layer 12 is formed which is composed of photoresist having resistance to heat. After exposure, the second resist layer 12 on the upper layer side is developed by using developer, and the first resist layer 11 on the lower layer side is etched, thereby forming an overhang type pattern.


Inventors:
OE HIDEAKI
HAGI TOSHIO
Application Number:
JP2001357430A
Publication Date:
May 30, 2003
Filing Date:
November 22, 2001
Export Citation:
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Assignee:
MURATA MANUFACTURING CO
International Classes:
G03F7/26; G03F7/40; H01L21/027; H01L21/28; H01L21/306; H01L21/3205; (IPC1-7): H01L21/027; G03F7/26; G03F7/40; H01L21/28; H01L21/306; H01L21/3205
Domestic Patent References:
JPH0973610A1997-03-18
JP2001230189A2001-08-24
JPH1124286A1999-01-29
JPH0831733A1996-02-02
JPH06267843A1994-09-22
Attorney, Agent or Firm:
Nishizawa Hitoshi