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Title:
FUNCTIONAL LIQUID APPLICATION APPARATUS, AND APPARATUS AND METHOD FOR EXCHANGING FUNCTIONAL LIQUID SUPPLY HEAD
Document Type and Number:
Japanese Patent JP2010119954
Kind Code:
A
Abstract:

To provide an apparatus and a method for exchanging a functional liquid supply head which can correct the impact position with good reproducibility without impacting droplets, or can correct the impact position with a simple mechanism, or can correct the impact position with an economical mechanism, and a functional liquid supply and application apparatus.

A specified portion of a head equipped with a plurality of nozzles for applying a functional liquid to a treatment substrate is photographed and the positioning shift between the specified portion of a head after exchange and the specified portion of the nozzle part before exchange is corrected based on results of photographs of both portions.


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Inventors:
KATAGIRI KENJI
Application Number:
JP2008295592A
Publication Date:
June 03, 2010
Filing Date:
November 19, 2008
Export Citation:
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Assignee:
HITACHI HIGH TECH CORP
International Classes:
B05C11/00; B05C5/00; B05D1/26; G02B5/20; G02F1/1339
Attorney, Agent or Firm:
Polaire Patent Business Corporation