Title:
Gas analysis meter
Document Type and Number:
Japanese Patent JP6251127
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a gas analyzer capable of preventing contamination due to fluorine with respect to an ion source even in the presence of fluorine and keeping the measurement sensitivity and operable time for a long time.SOLUTION: Disclosed is a gas analyzer 100 which is equipped with an ion box 11 inside which sample gas is introduced, and analyzes the sample gas ionized in the ion box 11. The ion box 11 is formed by specific metal and fluoride of the specific metal is gas under measurement conditions of the gas analyzer.
Inventors:
Tomoko Katsuta
Yabushita Hirotaka
Yabushita Hirotaka
Application Number:
JP2014121147A
Publication Date:
December 20, 2017
Filing Date:
June 12, 2014
Export Citation:
Assignee:
HORIBA STEC Co., Ltd.
International Classes:
H01J49/10; G01N27/62
Domestic Patent References:
| JP11195399A | ||||
| JP60202647A | ||||
| JP7153419A | ||||
| JP48012092A | ||||
| JP60193251A |
Foreign References:
| US4266127 |
Attorney, Agent or Firm:
Ryuhei Nishimura
Saito Shindai
Saito Shindai
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